因静电会减少产品优率,电磁干扰会中断自动设备运行,静电吸附会增加表面微粒收集的难度,因此对静电的产生进行控制也是必要的。因为静电电荷事实上会把污染物吸附在产品或工具表面,静电吸附正变为洁净室观注的焦点。例如,将4英寸晶片充电至1KV时,对直径为1微米的微粒的吸附力将达到830000英磅/平方英寸。因此,与重力、空气动力和粘附力相比,带电物体与微粒间的静电吸附将更强。

 

Due to static electricity will reduce the product's excellent rate, the electromagnetic interference will interrupt automatic equipment operation, electrostatic adsorption will increase the difficulty of the surface particles collection, therefore the production of static electricity is necessary. Because of the fact that the electrostatic charge will be absorbed in the product or the surface of the tool, the electrostatic adsorption is becoming the focus of the clean room. For example, the 4 inch wafer charge to 1KV, the diameter of 1 micron particle adsorption capacity will reach 830000 pounds per square inch. Therefore, compared with the gravity, the air force and the adhesion force, the electrostatic adsorption between the charged object and the particle will be stronger.

 

在空气净化工程 http://www.jnjkjh.com/ 中的静电危害主要表现在:

 

The main performance of electrostatic hazard in air purification project:

 

1.吸附灰尘。由于静电吸附作用，洁净室内空气微粒吸附在电子元器件表面和墙壁表面，影响产品质量和洁净度。静电也成为洁净室新的发尘源。

 

1 Adsorption of dust. Due to the electrostatic interaction, the clean indoor air particles adsorbed on the surface of the electronic components surface and wall, affecting product quality and cleanliness. Static electricity has become a new source of dust in the clean room.

 

2.诱发火灾与爆炸。电子工业洁净室中会大量使用易燃易爆气体、液体和有机溶剂，静电会成为这些气（液）体和溶剂的引火源，引起火灾或爆炸。

 

2 induced fire and explosion. Electronic industrial clean room will be a large number of the use of flammable and explosive gas, liquid and organic solvent, static electricity will become the gas (liquid) and solvent ignition source, causing a fire or explosion.

 

3.电晕放电，或火花放电，发出噪声，干扰电子设备和电子元器件。

 

3 corona discharge, or spark discharge, the issue of noise, the interference of electronic equipment and electronic components.

 

4.产生静电电场，使电子元器件短路、疲劳或破损。

 

4 to produce an electric field, so that the electronic components short circuit, fatigue or damage.